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Mechanical properties of amorphous carbon nitride films

✍ Scribed by Lou, H.Q.; Axén, N.; Somekh, R.E.; Hutchings, I.M.

Book ID: 123310625
Publisher: Elsevier Science
Year: 1996
Tongue: English
Weight: 662 KB
Volume: 5
Category: Article
ISSN: 0925-9635
DOI: 10.1016/0925-9635(96)00557-2

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