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Effect of air post contamination on mechanical properties of amorphous carbon nitride thin films

✍ Scribed by M. Lejeune; M. Benlahsen; P. Lemoine

Book ID
108269497
Publisher
Elsevier Science
Year
2005
Tongue
English
Weight
197 KB
Volume
135
Category
Article
ISSN
0038-1098

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Nanoindentation hardness and compressive stress in amorphous carbon nitride thin films prepared by unbalanced magnetron sputter-deposition were studied. The coating hardness and compressive stress were found to be strongly dependent on processing parameters such as substrate bias and nitrogen partia