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Argon gas dilution effect on the properties of amorphous carbon nitride thin films

✍ Scribed by Aryal, Hare Ram; Adhikari, Sudip; Ghimire, Dilip Chandra; Uchida, Hideo; Umeno, Masayoshi


Book ID
121951655
Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
340 KB
Volume
16
Category
Article
ISSN
0925-9635

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