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Mechanical properties of amorphous boron carbon nitride films produced by dual gun sputtering

✍ Scribed by Chien, S

Book ID: 122941046
Publisher: Elsevier Science
Year: 2003
Tongue: English
Weight: 228 KB
Volume: 12
Category: Article
ISSN: 0925-9635
DOI: 10.1016/S0925-9635(03)00175-4

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