𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Mechanical modeling of ion beam lithography masks

✍ Scribed by A. Fisher; R. Tejeda; M. Sprague; R. Engelstad; E. Lovell


Book ID
114155782
Publisher
Elsevier Science
Year
1998
Tongue
English
Weight
302 KB
Volume
41-42
Category
Article
ISSN
0167-9317

No coin nor oath required. For personal study only.


πŸ“œ SIMILAR VOLUMES


Masked ion beam lithography for proximit
✍ E. Hammel; H. LΓΆschner; G. Stengl; H. Buschbeck; A. Chalupka; H. Vonach; E. Ceka πŸ“‚ Article πŸ“… 1996 πŸ› Elsevier Science 🌐 English βš– 401 KB