✦ LIBER ✦
Repair of open stencil masks for ion projection lithography by e-beam induced metal deposition
✍ Scribed by K.T. Kohlmann; L.-M. Buchmann; W.H. Brünger
- Publisher
- Elsevier Science
- Year
- 1992
- Tongue
- English
- Weight
- 295 KB
- Volume
- 17
- Category
- Article
- ISSN
- 0167-9317
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