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Mechanical characterization of zeolite low dielectric constant thin films by nanoindentation

✍ Scribed by Mark Johnson; Zijian Li; Junlan Wang; Yushan Yan

Book ID: 108289335
Publisher: Elsevier Science
Year: 2007
Tongue: English
Weight: 289 KB
Volume: 515
Category: Article
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2006.01.048

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