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Mechanical properties of thin films measured by nanoindenters

✍ Scribed by Hiromi Ishikawa; Shuichi Fudetani; Mitsuji Hirohashi

Book ID
108417451
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
140 KB
Volume
178
Category
Article
ISSN
0169-4332

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πŸ“œ SIMILAR VOLUMES

Effects of the substrate on the determin
Effects of the substrate on the determination of thin film mechanical properties by nanoindentation
✍ Ranjana Saha; William D. Nix πŸ“‚ Article πŸ“… 2002 πŸ› Elsevier Science 🌐 English βš– 511 KB

We examine the effects of the substrate on the determination of mechanical properties of thin films by nanoindentation. The properties of aluminum and tungsten films on the following substrates have been studied: aluminum, glass, silicon and sapphire. By studying both soft films on hard substrates a