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Characterization of mechanical properties of thin films using nanoindentation test

✍ Scribed by Hervé Pelletier; Joël Krier; Pierre Mille


Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
578 KB
Volume
38
Category
Article
ISSN
0167-6636

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In recent years, the extraction of mechanical behaviour of thin films by nanoindentation using sharp indenter geometry has been extensively studied. This work investigates the mechanical properties of TiO 2 thin film (1 μm thickness) deposited by spin coating on dual phase Duplex stainless steel and