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Mechanical property characterization of thin films using spherical tipped indenters

✍ Scribed by M.V. Swain; J. Menčík


Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
861 KB
Volume
253
Category
Article
ISSN
0040-6090

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Mechanical Characterization of Thin Film
✍ Malgorzata Kopycinska-Müller; Andre Striegler; Bernd Köhler; Klaus-Jürgen Wolter 📂 Article 📅 2010 🏛 John Wiley and Sons 🌐 English ⚖ 361 KB 👁 2 views

## Abstract The atomic force acoustic microscopy (AFAM) technique has been used to determine elastic properties of films with thicknesses decreasing from several hundreds of nanometers to several nanometers. It has been shown that metal films as thin as 50 nm can be characterized directly without t