Evaluation of Mechanical Properties of TiN Films by Ultralow Load Indentation: M. E. O'Hern, R. H. Parrish, W. C. Oliver, Thin Solid Films, 181 pp. 357–363, (Dec 10, 1989)

• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 284 KB
• Volume: 13
• Category: Article
• ISSN: 0141-6359
• DOI: 10.1016/0141-6359(91)90267-m