✦ LIBER ✦
Thin film characterization using a mechanical properties microprobe: W C Oliver et al, Thin Solid Films, 153, 1987, 185–196
- Publisher
- Elsevier Science
- Year
- 1989
- Tongue
- English
- Weight
- 151 KB
- Volume
- 39
- Category
- Article
- ISSN
- 0042-207X
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