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Mechanical properties of sputtered silicon oxynitride films by nanoindentation

✍ Scribed by Yan Liu; I.-Kuan Lin; Xin Zhang

Publisher: Elsevier Science
Year: 2008
Tongue: English
Weight: 366 KB
Volume: 489
Category: Article
ISSN: 0921-5093
DOI: 10.1016/j.msea.2008.01.063

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## Abstract Nanoindentation has recently emerged to be the primary method to study the mechanical behavior and reliability of human enamel. Its hardness and elastic modulus were generally reported as average values with standard deviations that were calculated from the results of multiple nanoinden