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Vibrational spectroscopy characterization of magnetron sputtered silicon oxide and silicon oxynitride films

✍ Scribed by V. Godinho; V.N. Denisov; B.N. Mavrin; N.N. Novikova; E.A. Vinogradov; V.A. Yakovlev; C. Fernández-Ramos; M.C. Jiménez de Haro; A. Fernández

Publisher: Elsevier Science
Year: 2009
Tongue: English
Weight: 703 KB
Volume: 256
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2009.07.101

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