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Electrical behavior of low-power RF magnetron-sputtered indium tin oxide films on silicon substrate

✍ Scribed by Bi-Shiou Chiou; Shu-Ta Hsieh; Wen-Fa Wu

Publisher: Elsevier Science
Year: 1994
Tongue: English
Weight: 472 KB
Volume: 74
Category: Article
ISSN: 0169-4332
DOI: 10.1016/0169-4332(94)90111-2

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