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Capacitance-Voltage Characterization of LPCVD-Silicon Oxynitride Films

โœ Scribed by Szekeres, A. ;Alexandrova, S. ;Modreanu, M.


Publisher
John Wiley and Sons
Year
2001
Tongue
English
Weight
97 KB
Volume
187
Category
Article
ISSN
0031-8965

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