✦ LIBER ✦

Ellipsometric characterization of hydrogen-rich oxynitride films

✍ Scribed by A. Borghesi; A. Sassella; S. Rojas

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Capacitance-Voltage Characterization of

✍ Szekeres, A. ;Alexandrova, S. ;Modreanu, M. 📂 Article 📅 2001 🏛 John Wiley and Sons 🌐 English ⚖ 97 KB

Characterization of PECVD deposited sili

✍ SP Speakman; PM Read; A Kiermasz 📂 Article 📅 1988 🏛 Elsevier Science 🌐 English ⚖ 543 KB

Characterization of LPCVD and PECVD sili

✍ F.H.P.M. Habraken 📂 Article 📅 1987 🏛 Elsevier Science 🌐 English ⚖ 708 KB

In situ real-time ellipsometric study of

✍ J. Campmany; A. Canillas; J.L. Andújar; J. Costa; E. Bertran 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 488 KB

In-situ ellipsometric characterization o

✍ James N. Hilfiker; Daniel W. Thompson; Jeffrey S. Hale; John A. Woollam 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 541 KB

The role of hydrogen in silicon nitride

✍ Dirk Schalch; Arthur Scharmann; Robert Wolfrat 📂 Article 📅 1985 🏛 Elsevier Science 🌐 English ⚖ 383 KB