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Plasma-enhanced deposition of silicon oxynitride films

✍ Scribed by J.E. Schoenholtz; D.W. Hess

Publisher: Elsevier Science
Year: 1987
Tongue: English
Weight: 380 KB
Volume: 148
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(87)90322-1

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