✦ LIBER ✦
Room-temperature, high-deposition-rate, plasma-enhanced chemical vapour deposition of silicon oxynitride thin films producing low surface damage on lattice-matched and pseudomorphic III–V quantum-well structures
✍ Scribed by R.E. Sah; J.D. Ralston; G. Eichin; B. Dischler; W. Rothemund; J. Wagner; E.C. Larkins; H. Baumann
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 583 KB
- Volume
- 259
- Category
- Article
- ISSN
- 0040-6090
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