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Nanoindentation testing of SU-8 photoresist mechanical properties

✍ Scribed by A.T. Al-Halhouli; I. Kampen; T. Krah; S. Büttgenbach


Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
182 KB
Volume
85
Category
Article
ISSN
0167-9317

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