Nanoindentation testing of SU-8 photoresist mechanical properties
✍ Scribed by A.T. Al-Halhouli; I. Kampen; T. Krah; S. Büttgenbach
- Publisher
- Elsevier Science
- Year
- 2008
- Tongue
- English
- Weight
- 182 KB
- Volume
- 85
- Category
- Article
- ISSN
- 0167-9317
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