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Mechanical characterization of low-k and barrier dielectric thin films

✍ Scribed by N. Chérault; G. Carlotti; N. Casanova; P. Gergaud; C. Goldberg; O. Thomas; M. Verdier

Book ID
108207498
Publisher
Elsevier Science
Year
2005
Tongue
English
Weight
184 KB
Volume
82
Category
Article
ISSN
0167-9317

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