✦ LIBER ✦
Lateral solvent diffusion characterization of low k dielectric plasma damage and ALD barrier film closure
✍ Scribed by Thomas Abell; Jorg Schuhmacher; Zsolt Tokei; Youssef Travaly; Karen Maex
- Book ID
- 104050380
- Publisher
- Elsevier Science
- Year
- 2005
- Tongue
- English
- Weight
- 156 KB
- Volume
- 82
- Category
- Article
- ISSN
- 0167-9317
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