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Mechanical and Tribological Properties of Thin Remote Microwave Plasma CVDa-Si:N:C Films from a Single-Source Precursor

✍ Scribed by Dariusz Bielinski; Aleksander M. Wrobel; Agnieszka Walkiewicz-Pietrzykowska

Book ID: 110392985
Publisher: Springer US
Year: 2002
Tongue: English
Weight: 165 KB
Volume: 13
Category: Article
ISSN: 1023-8883
DOI: 10.1023/a:1020144313969

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