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Mechanical and thermophysical properties of PECVD oxynitride films measured by MEMS

✍ Scribed by M.S Guimarães; A Sinatora; M.I Alayo; I Pereyra; M.N.P Carreño

Book ID: 117226603
Publisher: Elsevier Science
Year: 2001
Tongue: English
Weight: 674 KB
Volume: 398-399
Category: Article
ISSN: 0040-6090
DOI: 10.1016/s0040-6090(01)01329-3

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