Determination of mechanical properties of PECVD silicon nitride thin films for tunable MEMS Fabry–Pérot optical filters

✍ Scribed by Huang, H; Winchester, K; Liu, Y; Hu, X Z; Musca, C A; Dell, J M; Faraone, L

• Book ID: 121512302
• Publisher: Institute of Physics
• Year: 2005
• Tongue: English
• Weight: 652 KB
• Volume: 15
• Category: Article
• ISSN: 0960-1317
• DOI: 10.1088/0960-1317/15/3/024