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Mechanical and ellipsometry measurements of thin TiN layer prepared by PIII

✍ Scribed by A.M. Abd El-Rahman; M. Raaif; S.H. Mohamed; A. Kolitsch

Book ID: 113784484
Publisher: Elsevier Science
Year: 2012
Tongue: English
Weight: 744 KB
Volume: 132
Category: Article
ISSN: 0254-0584
DOI: 10.1016/j.matchemphys.2011.11.001

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