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Surface reflectivity of TiN thin films measured by spectral ellipsometry

โœ Scribed by E. Pascual; M.C. Polo; J. Esteve; E. Bertran


Book ID
118364572
Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
388 KB
Volume
251-252
Category
Article
ISSN
0039-6028

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