Characterization of growing thin films by in situ ellipsometry, spectral reflectance and transmittance measurements, and ion-scattering spectroscopy

✍ Scribed by Netterfield, R. P.; Martin, P. J.; Sainty, W. G.; Duffy, R. M.; Pacey, C. G.

• Book ID: 121356174
• Publisher: American Institute of Physics
• Year: 1985
• Tongue: English
• Weight: 805 KB
• Volume: 56
• Category: Article
• ISSN: 0034-6748
• DOI: 10.1063/1.1138408