✦ LIBER ✦
Characterization of TiAlN thin film annealed under O[sub 2] by in situ time of flight direct recoil spectroscopy/mass spectroscopy of recoiled ions and ex situ x-ray photoelectron spectroscopy
✍ Scribed by Tempez, A.; Bensaoula, A.; Schultz, A.
- Book ID
- 125447368
- Publisher
- AVS (American Vacuum Society)
- Year
- 2002
- Tongue
- English
- Weight
- 358 KB
- Volume
- 20
- Category
- Article
- ISSN
- 0734-2101
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