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Measuring and modeling the proximity effect in direct-write electron-beam lithography kinoforms

✍ Scribed by Nikolajeff, Fredrik ;Bengtsson, Jörgen ;Larsson, Michael ;Ekberg, Mats ;Hård, Sverker

Book ID: 115343953
Publisher: The Optical Society
Year: 1995
Tongue: English
Weight: 170 KB
Volume: 34
Category: Article
ISSN: 1559-128X
DOI: 10.1364/AO.34.000897

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