✦ LIBER ✦

Advances on proximity effect measurement and correction in electron beam lithography

✍ Scribed by B. Dal'zotto; H. Dugourd; M. Lerme; F. Méot

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Proxy — A new approach for proximity cor

✍ V.V. Aristov; A.I. Erko; B.N. Gaifullin; A.A. Svintsov; S.I. Zaitsev; R.R. Jede; 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 315 KB

Determination of proximity effect correc

✍ M.G. Rosenfield; S.J. Wind; W.W. Molzen; P.D. Gerber 📂 Article 📅 1990 🏛 Elsevier Science 🌐 English ⚖ 562 KB

Proximity effect in high voltage electro

✍ M.N. Webster; A.H. Verbruggen; J. Romijn; H.F.F. Jos; P.M.A. Moors; S. Radelaar 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 355 KB

Neural networks application for fast, di

✍ P. Jedrasik 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 315 KB

Effect of time-dependent development pro

✍ P.R. Deshmukh; W.S. Khokle 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 496 KB

Advances in high resolution and high thr

✍ H. Ahmed 📂 Article 📅 1987 🏛 Elsevier Science 🌐 English ⚖ 132 KB