✦ LIBER ✦
Neural networks application for fast, direct correction kernel generation for proximity effeccts correction in Electron Beam Lithography
✍ Scribed by P. Jedrasik
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 315 KB
- Volume
- 27
- Category
- Article
- ISSN
- 0167-9317
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