✦ LIBER ✦
The proximity effect in electron beam lithography : Ernst-Bernhard Kley, Peter Pertsch and Jurgen Jablonski. Jena Rev.2, 93 (1982)
- Book ID
- 103279812
- Publisher
- Elsevier Science
- Year
- 1983
- Tongue
- English
- Weight
- 73 KB
- Volume
- 23
- Category
- Article
- ISSN
- 0026-2714
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