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Measurement of ion energy distributions in the bias enhanced nucleation of chemical vapor deposited diamond

✍ Scribed by Kátai, Sz.; Tass, Z.; Hárs, Gy.; Deák, P.


Book ID
126954944
Publisher
American Institute of Physics
Year
1999
Tongue
English
Weight
351 KB
Volume
86
Category
Article
ISSN
0021-8979

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