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Epitaxial nucleation of diamond on β-SiC via bias-enhanced microwave plasma chemical vapor deposition

✍ Scribed by Stoner, B.R.; Ma, G.H.; Wolter, S.D.; Zhu, W.; Wang, Y.-C.; Davis, R.F.; Glass, J.T.

Book ID: 120193351
Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 565 KB
Volume: 2
Category: Article
ISSN: 0925-9635
DOI: 10.1016/0925-9635(93)90045-4

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