✦ LIBER ✦

Diamond growth on CoSi2/Si by bias-enhanced microwave plasma chemical vapor deposition method

✍ Scribed by Mao Rong Chen; Li Chang; Der Fu Chang; Hou Guang Chen

Book ID: 114192832
Publisher: Elsevier Science
Year: 2001
Tongue: English
Weight: 214 KB
Volume: 72
Category: Article
ISSN: 0254-0584
DOI: 10.1016/s0254-0584(01)00430-8

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Positive-bias enhanced growth of high qu

Positive-bias enhanced growth of high quality diamond films by microwave plasma chemical vapor deposition

✍ Saito, D.; Isshiki, H.; Kimura, T. 📂 Article 📅 2009 🏛 Elsevier Science 🌐 English ⚖ 973 KB

Hexagonal diamond formation on steel sub

Hexagonal diamond formation on steel substrates by negative bias microwave plasma enhanced chemical vapor deposition

✍ V. Amornkitbamrung; T. Burinprakhone; W. Jarernboon 📂 Article 📅 2009 🏛 Elsevier Science 🌐 English ⚖ 392 KB

This paper reports for the first time the synthesis of hexagonal diamond thin films on high-speed steel substrates by multi-mode microwave plasma enhanced chemical vapor deposition. Before deposition of the films, the substrate surface was treated by scratching with diamond powder. The deposited fil

Growth of nanocrystalline diamond films

Growth of nanocrystalline diamond films by biased enhanced microwave plasma chemical vapor deposition

✍ Sharda, T.; Soga, T.; Jimbo, T.; Umeno, M. 📂 Article 📅 2001 🏛 Elsevier Science 🌐 English ⚖ 127 KB

Biased enhanced growth of nanocrystallin

Biased enhanced growth of nanocrystalline diamond films by microwave plasma chemical vapor deposition

✍ Sharda, T; Soga, T; Jimbo, T; Umeno, M 📂 Article 📅 2000 🏛 Elsevier Science 🌐 English ⚖ 286 KB

Epitaxial nucleation of diamond on β-SiC

Epitaxial nucleation of diamond on β-SiC via bias-enhanced microwave plasma chemical vapor deposition

✍ Stoner, B.R.; Ma, G.H.; Wolter, S.D.; Zhu, W.; Wang, Y.-C.; Davis, R.F.; Glass, 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 565 KB

Heteroepitaxial diamond nucleation and g

Heteroepitaxial diamond nucleation and growth on silicon by microwave plasma-enhanced chemical vapor deposition synthesis

✍ Guo, X.J.; Sung, S.L.; Lin, J.C.; Chen, F.R.; Shih, H.C. 📂 Article 📅 2000 🏛 Elsevier Science 🌐 English ⚖ 843 KB