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Epitaxial nucleation of diamond on an iridium substrate by bias treatment, for microwave plasma-assisted chemical vapor deposition

✍ Scribed by Saito, Takeyasu; Tsuruga, Shigenori; Ohya, Nobutaka; Kusakabe, Katsuki; Morooka, Shigeharu; Maeda, Hideaki; Sawabe, Atsuhito; Suzuki, Kazuhiro


Book ID
121906955
Publisher
Elsevier Science
Year
1998
Tongue
English
Weight
227 KB
Volume
7
Category
Article
ISSN
0925-9635

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This paper reports for the first time the synthesis of hexagonal diamond thin films on high-speed steel substrates by multi-mode microwave plasma enhanced chemical vapor deposition. Before deposition of the films, the substrate surface was treated by scratching with diamond powder. The deposited fil