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The effect of substrate bias voltage on the nucleation of diamond crystals in a microwave plasma assisted chemical vapor deposition process

✍ Scribed by Jiang, X.; Six, R.; Klages, C.-P.; Zachai, R.; Hartweg, M.; Fü&gber, H.-J.


Book ID
123389547
Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
569 KB
Volume
2
Category
Article
ISSN
0925-9635

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