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Influence of process parameters on the size of the bias-nucleated area for diamond deposition with plasma-enhanced chemical vapour deposition

✍ Scribed by Lorenz, Hans Peter; Schilling, Wolfgang


Book ID
123076355
Publisher
Elsevier Science
Year
1997
Tongue
English
Weight
934 KB
Volume
6
Category
Article
ISSN
0925-9635

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