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Effects of hydrogen plasma on the diamond nucleation by chemical vapour deposition

✍ Scribed by Yugo, S.; Kanai, T.; Kimura, T.


Book ID
120041188
Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
531 KB
Volume
1
Category
Article
ISSN
0925-9635

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Effect of reaction pressure on the nucle
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Synthetic diamond particles were deposited on a Si (1 0 0) substrate using a hot-filament chemical-vapour-deposition method in order to study the effect of the reaction pressure on the nucleation behaviour. The reaction pressure was controlled, as an experimental variable, from 2 to 50 torr under th