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Nucleation and initial growth of diamond by biased hot filament chemical vapour deposition

✍ Scribed by W.L. Wang; G. Sánchez; M.C. Polo; R.Q. Zhang; J. Esteve


Publisher
Springer
Year
1997
Tongue
English
Weight
992 KB
Volume
65
Category
Article
ISSN
1432-0630

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Synthetic diamond particles were deposited on a Si (1 0 0) substrate using a hot-filament chemical-vapour-deposition method in order to study the effect of the reaction pressure on the nucleation behaviour. The reaction pressure was controlled, as an experimental variable, from 2 to 50 torr under th