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Effect of substrate bias voltage on the properties of diamond-like carbon thin films deposited by microwave surface wave plasma CVD

✍ Scribed by Adhikari, Sudip; Ghimire, Dilip Chandra; Aryal, Hare Ram; Kalita, Golap; Umeno, Masayoshi

Book ID: 121312390
Publisher: Elsevier Science
Year: 2008
Tongue: English
Weight: 299 KB
Volume: 17
Category: Article
ISSN: 0925-9635
DOI: 10.1016/j.diamond.2007.10.006

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