Heteroepitaxial nucleation of diamond by bias pretreatment in an electron cyclotron resonance microwave chemical vapor deposition system

✍ Scribed by N. Maréchal; S. Yamashita

• Book ID: 114086155
• Publisher: Elsevier Science
• Year: 1996
• Tongue: English
• Weight: 339 KB
• Volume: 290-291
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/s0040-6090(96)09200-0