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Ion energy distributions and their evolution during bias-enhanced nucleation of chemical vapor deposition of diamond

✍ Scribed by Kátai, Sz.; Kováts, A.; Maros, I.; Deák, P.


Book ID
122851079
Publisher
Elsevier Science
Year
2000
Tongue
English
Weight
187 KB
Volume
9
Category
Article
ISSN
0925-9635

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