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Chemical vapor deposition of uniform and high-quality diamond films by bias-enhanced nucleation method

✍ Scribed by Jhih-Kun Yan; Li Chang

Book ID: 108288934
Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 609 KB
Volume: 498
Category: Article
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2005.07.097

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