✦ LIBER ✦

Mass spectroscopy in plasma-enhanced chemical vapor deposition of silicon–oxide films using tetramethoxysilane

✍ Scribed by Y Inoue; O Takai

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Plasma enhanced chemical vapor depositio

✍ M.S. Kang; T.H. Chung; Y. Kim 📂 Article 📅 2006 🏛 Elsevier Science 🌐 English ⚖ 187 KB

Optical properties of nanocrystalline si

✍ Atif Mossad Ali 📂 Article 📅 2007 🏛 Elsevier Science 🌐 English ⚖ 433 KB

Electron spectroscopy of plasma-enhanced

✍ S. Azimi-Nam; T. Hashemi; F. Golestani-Fard 📂 Article 📅 1987 🏛 Springer 🌐 English ⚖ 334 KB

Growth and characterization of silicon-n

✍ I.K. Han; Y.J. Lee; J.W. Jo; J.I. Lee; K.N. Kang 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 310 KB

Room-temperature plasma-enhanced chemica

✍ K. Yamaoka; Y. Yoshizako; H. Kato; D. Tsukiyama; Y. Terai; Y. Fujiwara 📂 Article 📅 2006 🏛 Elsevier Science 🌐 English ⚖ 136 KB

Plasma-enhanced chemical vapor depositio

✍ J.L. Leclercq; J. Durand; L. Cot; R. Berjoan; C. Dupuy 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 646 KB