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Mass spectrometric analysis during the vapor deposition of amorphous silicon

✍ Scribed by H. Mell; M.H. Brodsky

Book ID: 103421777
Publisher: Elsevier Science
Year: 1977
Tongue: English
Weight: 463 KB
Volume: 46
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(77)90186-9

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