Mass-Spectrometric Studies of Catalytic Chemical Vapor Deposition Processes of Organic Silicon Compounds Containing Nitrogen

✍ Scribed by Morimoto, Takashi; Ansari, S. G.; Yoneyama, Koji; Nakajima, Teppei; Masuda, Atsushi; Matsumura, Hideki; Nakamura, Megumi; Umemoto, Hironobu

• Book ID: 121857474
• Publisher: Institute of Pure and Applied Physics
• Year: 2006
• Tongue: English
• Weight: 161 KB
• Volume: 45
• Category: Article
• ISSN: 0021-4922
• DOI: 10.1143/JJAP.45.961