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Maskless Mn implantation in GaAs using focused Mn ion beam

✍ Scribed by M. Itou; M. Kasai; T. Kimura; J. Yanagisawa; F. Wakaya; Y. Yuba; K. Gamo

Book ID: 114167254
Publisher: Elsevier Science
Year: 2003
Tongue: English
Weight: 230 KB
Volume: 206
Category: Article
ISSN: 0168-583X
DOI: 10.1016/s0168-583x(03)00924-8

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