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Defects induced by focused ion beam implantation in GaAs

✍ Scribed by Miyake, Hideto

Book ID: 121876112
Publisher: AVS (American Vacuum Society)
Year: 1988
Tongue: English
Weight: 661 KB
Volume: 6
Category: Article
ISSN: 0734-211X
DOI: 10.1116/1.584335

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